MEMS Tri-axial Tactile Sensor packaging using polymer fleible cable for sensorised guide wire application

摘要

This paper presents the integration process of tactile sensor system using polymer flexible cable for sensorised guide wire application and described the fabrication process flow of polyimide flexible cable, silicon holder and sensorised guide wire assembly processes. Polyimide flexible cable is used for the integration due its biocompatibility and suitable mechanical properties for flexible cable bending. Sensorised guide wire prototype was assembled using dummy sensor and ASIC chip.