Cathodoluminescence spectroscopic study of the boron-nitrogen co-doping diamond films

摘要

Co-doping diamond is of scientific and technologically interest because a new electrical and/or optical property is expected to obtain. In this study, we have carried out a simultaneous addition of diborane and nitrogen in the gas phase for the growth of co-doping diamonds by microwave plasma-assisted chemical vapor deposition (MPCVD) method. We measured the cathodoluminescence (CL) spectra of the co-doping diamond films. To investigate the effect of boron-nitrogen co-doping addition on the CL spectra, we compared the CL spectra of boron-nitrogen co-doping diamonds with those of nitrogen-doped diamonds. The results revealed that the addition of boron suppressed the nitrogen incorporation into the CVD diamonds.