Epitaxial Growth Technique using InP-on-Insulator towards Ⅲ-Ⅴ/Si Photonic Integrated Circuits

摘要

We have developed a selective epitaxial growth techniqueusing InP-on-insulator, which enableswide-wavelength-range DML arrays on silicon. The resultspoint to the possibility of using this technique to fabricateInP/Si PICs for datacenter applications.