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Angular coordinate error testing of circular writing laser system using Fizeau interferometer

机译:使用Fizeau干涉仪测试圆形书写激光系统的角坐标误差

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Diffractive optical elements (DOE) with an arbitrary topology are widely used in various fields of modern science andtechnology. Our paper is dedicated to diffractive optics, which is produced by circular laser writing on CLWS-300. In theprocess of fabrication of diffractive element, a pre-calculated pattern is written on the optical substrate. During this process,writing errors occur that can introduce distortions into the wavefront generated by diffractive optical element. The error ofthe angular coordinate can make the most significant contribution to the total error. In addition, this type of error is themost difficult to control and correct.In this paper, we propose a method for measuring the angular coordinate error of the circular laser writing systems basedon laser interferometry. The method includes writing special test samples and their subsequent control using a conventionalFizeau interferometer. The angular coordinate error is calculated from the phase map. This method allows detecting errorsof the angular coordinates up to 1-2 ang. sec. The test pattern can also be written on the same substrate within a singlefabrication process with main pattern. This allows certification and quality control of the fabricated diffractive opticalelement. In addition, laser writing system can be periodically tested to verify that angular coordinate error is withinacceptable limits. The method described in article can be extended to any writing system operating in the polar coordinatesystem.
机译:具有任意拓扑的衍射光学元件(DOE)广泛用于现代科学的各个领域 技术。我们的纸张专用于衍射光学器件,由CLWS-300上的圆激光书写产生。在里面 衍射元件的制造过程,将预先计算的图案写在光学基板上。在这个过程中, 发生写入错误,可以将差异引入衍射光学元件生成的波前的扭曲。错误的错误 角度坐标可以为总误差做出最大的贡献。此外,这种错误是 最难控制和正确。 在本文中,我们提出了一种测量基于圆激光写入系统的角度坐标误差的方法 在激光干涉测量中。该方法包括使用常规编写特殊测试样本及其随后的控制 外汇干涉仪。角坐标误差由相位映射计算。此方法允许检测错误 角度坐标高达1-2 ang。秒。测试图案也可以在单个基板内写入相同的基板 具有主要图案的制造过程。这允许制造的衍射光学的认证和质量控制 元素。此外,可以定期测试激光书写系统以验证角度坐标误差是否在内 可接受的限制。文章中描述的方法可以扩展到在极性坐标中操作的任何写入系统 系统。

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