Error Measurement Method in the Fabrication of Precision Synthesized Holograms on Circular Laser Writing Systems

摘要

A method has been developed and investigated to measure the fabrication accuracy of precision synthesized structures by circular laser writing systems using special microstructures formed in two orthogonal directions. These microstructures consist of two parts, one of which is formed before precision structure fabrication, and the second during this process. The shift between the first and second part of the microstructure can be used to determine the errors due to drift, substrate shift, etc. in each of the coordinate directions. The method provides increased accuracy and certification reliability in the fabrication of precision synthesized structures.