Development of Zero-Shrinkage-LTCC Substrate for Millimeter-Wave Applications

摘要

In this work, we have developed a new low-temperature co-fired ceramic (LTCC) substrate for millimeterwave circuits. The substrate has a low dielectric loss tangent of 0.0019 and a dielectric constant of 7.65 at a frequency of 60 GHz. An accuracy of a printed circuit pattern is achieved by -1.3% using a shrinkage control technique. In this report, we present the performance of the LTCC substrate by evaluating its dielectric properties and by evaluating the transmission properties of a coplanar waveguide transmission line designed using the LTCC substrate.