A review on modeling of few MEMS devices and further issues

摘要

As the technologies are improving, the need of MEMS devices is increasing. Different modeling strategies are proposed to model MEMS devices. In this paper, the study of this different modeling strategies, their advantages and disadvantages are discussed for MEMS Butterfly Gyroscope, MEMS Micro-gripper, MEMS Microphone and MEMS Piezoelectric Energy Harvester. Different model order techniques have been used in the modeling of MEMS devices. Model order reduction technique are suggested for few cases. For few linearized system, nonlinear model order reduction techniques can be used without linearizing the nonlinear model, to get accurate results.