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NOVEL THERMAL MANAGEMENT OF GAN ELECTRONICS - DIAMOND SUBSTRATES

机译:GAN电子的新型热管理-金刚石基材

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摘要

Microwave and power electronics based on GaN enables the performance of systems and their safe operating area to be driven to 'extremes'. One of the major issues that then arises is thermal management. This includes heat transfer limitations across interfaces, however also the need of incorporating novel high thermal conductivity materials such as diamond. Thermal parameters of these novel device systems and their implications on the near junction temperature in the devices are not well known. The role of interfaces between the GaN transistor and the diamond substrate, and of the diamond thermal properties themselves near this interface are discussed, and novel thermal characterization approaches, such as enabling fast determination of the thermal resistance on the wafer level, as well as of lateral diamond thermal conductivity, are presented.
机译:基于GaN的微波和电力电子设备使系统的性能及其安全操作区域达到“极限”。然后出现的主要问题之一是热管理。这包括跨界面的传热限制,但是还需要结合新的高导热率材料(例如金刚石)。这些新颖的器件系统的热参数及其对器件中近结温度的影响尚不为人所知。讨论了GaN晶体管与金刚石基板之间的界面的作用以及该界面附近的金刚石热性能本身,并提出了新颖的热表征方法,例如能够快速确定晶圆级的热阻以及硅片的热阻。介绍了金刚石的横向导热率。

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