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Design and nanofabrication of subwavelength grating-based polarizer for visible wavelengths

机译:用于可见波长的亚波长光栅偏振器的设计和纳米制造

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Light transmittance and extinction ratio are the two most important properties to characterize the performance of grating-based polarizers. Basic research was conducted to study the structural effect of grating line cross section on the polarization characteristics. To maximize both the transmittance and the extinction ratio, the grating materials, the geometrical dimensions and the grating line structure are systematically studied. Then, a shape in the form of a rectangle stacked with a parabolic shape on top was proposed for achieving both high transmittance and extinction ratio. Nanofabrication for subwavelength gratings in Al was carried out. High transmittance over 70% was achieved, but the extinction ratio was still not satisfactory, which was ascribed to the thickness in the fabricated grating not being large enough. However, the measured ratio fits to the simulation result well, indicating that the designed grating parameters can be a good basis for high-quality polarizers based on subwavelength gratings of aluminum.
机译:透光率和消光比是表征基于光栅的偏振器的性能的两个最重要的性能。进行了基础研究,研究了光栅线横截面对极化特性的结构效果。为了最大化透射率和消光比,系统地研究光栅材料,几何尺寸和光栅结构。然后,提出了以抛物线形状堆叠在顶部的矩形形式的形状,用于实现高透射率和消光比。进行Al中亚波长光栅的纳米制剂。实现高70%的高透射率,但消光比仍然不令人满意,其归因于制造光栅中的厚度不够大。然而,测量的比率很适合仿真结果,表明设计的光栅参数可以是基于铝的亚壳的高质量偏振器的良好基础。

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