A NOVEL RECIPROCATING MICROPUMP BASED ON LORENTZ FORCE

摘要

Lorentz force is the pumping basis of many electromagnetic micropumps used in lab-on-a-chip. In this paper a novel reciprocating single-chamber micropump is proposed, in which the actuation technique is based on Lorentz force acting on an array of microwires attached on a membrane surface. An alternating current is applied through the microwires in the presence of a magnetic field. The resultant force causes the membrane to oscillate and pushes the fluid to flow through microchannel using a ball-valve. The pump chamber (3 mm depth) was fabricated on a Polymethylmethacrylate (PMMA) substrate using laser engraving technique. The chamber was covered by a 60 μm thick hyper-elastic latex rubber diaphragm. Two miniature permanent magnets capable of providing magnetic field of 0.09 T at the center of the diaphragm were mounted on each side of the chamber. Square wave electric current with low-frequencies was generated using a function generator. Cylindrical copper microwires (250 μm diameter and 5 mm length) were attached side-by-side on top surface of the diaphragm. Thin loosely attached wires were used as connectors to energize the electrodes. Due to large displacement length of the diaphragm (～3 mm) a high efficiency (～90%) ball valve (2 mm diameter stainless steel ball in a tapered tubing structure) was used in the pump outlet. The micropump exhibits a flow rate as high as 490 μl/s and pressure up to 1.5 kPa showing that the pump is categorized among high-flow-rate mechanical micropumps.