Low-cost reciprocating electromagnetic-based micropump for high-flow rate applications

摘要

A reciprocating single-chamber micropump is designed and experimentally tested. The actuation technique of the pump is based on Lorentz force acting on an array of low-weight microwires placed on a flexible membrane surface. A square-wave electric current (5.6 and 7.8 A) with a low-frequency range (5.6 to 7.6 Hz) is applied through the microwires in the presence of a perpendicular magnetic field (0.08 to 0.09 T). The resultant oscillating Lorentz force causes the membrane to oscillate with the same frequency, and pushes the fluid to flow toward the outlet using a high-efficiency ball-valve. The micropump has exhibited a maximum efficiency of 2.03% with a flow rate as high as 490 μl/s and back pressure up to 1.5 kPa. Having a high self-pumping frequency of F_(sp) = 32.71 / min compared to other micropumps, our proposed pump is suitable for a wide range of applications specifically for biofluid transport.