Preserving Optical Confinement in Unannealed PECVD SiO_2 Waveguides

摘要

Rib and buried channel waveguides (BCWs) made of unannealed PECVD SiO_2 were studied after exposure to high humidity. Low stressed rib waveguides had lower optical throughput change, while high index difference BCWs were practically unaffected.