Charge injection Super-lattice Phase Change Memory for low power and high density storage device applications

摘要

A new charge injection Super-lattice Phase Change Memory was developed with optimized GeTe/Sb2Te3 deposition and state-of-the-art analytical techniques. First principle calculations showed the charge injection enhanced Ge atom movement for the first time. We achieved 0.46 V and 3.3 MA/cm2 reset and MLC programming. The stability of Super-lattice after 1E6 cycles was verified by thermal analysis characteristic to Ge 4-fold to Ge 6-fold transition.