An Ultra-compact Micro-valve for Low Pressure Gas-Flow Control

摘要

We describe the fabrication and performance characterisation of a ～0.1cm~3 micro-valve, designed to regulate a compressed gas supply at pressures <1bar. The electro-active components were fabricated by ultra-precision grinding in combination with standard micro-fabrication techniques. The structural components were made from a photo-etchable glass-ceramic. Steady jets with velocities greater than 200m/s were measured using supply pressures ≤ 60kPa and static actuation voltages ≤ 40V. The gauge jet pressure ratio was linearly related to the static actuation voltage below 60kPa. The exceptional light weight of the valves and their simple construction could open up new possibilities for active aerodynamic flow-control systems, for medical diagnostics and for personalised healthcare systems, amongst other applications.