Profile variation impact on FIB cross-section metrology

机译：轮廓变化对FIB横截面计量的影响

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The focused ion beam (FIB) milling tool is an important component of reference metrology and process characterization,both as a supporting instrument for bulk sample preparation before forwarding to the transmission electron microscope(TEM) and other inst

机译：聚焦离子束（FIB）铣削工具是参考计量和工艺表征的重要组成部分，无论是在转发到透射电子显微镜（TEM）和其他内部的散装样品制剂的支撑仪

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《Conference on metrology, inspection, and process control for microlithography XXVI》|2012年|P.OY.1-OY.7|共7页
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Aaron Cordes; Benjamin Bunday;
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中图分类光刻、掩膜;光刻、掩膜;
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Profile variation impact on FIB cross-section metrology

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