Directed nanorobot-based handling of single nanowires

摘要

Within this paper, a new experimental implementation is presented in order to facilitate well directed handling of silicon nanowires with dimensions of about 10 μm length and less than 100 nm diameter. The experimental strategy employs adhesive bond techniques and FIB assisted milling to transfer nanowires from a production substrate to a different electrode substrate for electrical characterization. Thus, further electrical characterization measurements were achieved, which are important for future applications of nanowires. An accurate picking from high-dense nanowire forests, a transfer over several centimeters, and a well directed placement onto the target are feasible using the presented handling technique. This contribution explains advantages, prospects and limits of the proposed handling strategy with regard to an automation heading for future applications.