Extraction of gate oxide quality and its correlation to the electrical parameters of MOS devices

摘要

Physical, chemical and electrical measurements are a useful tool to determine some of the most important parameters in MOS devices. Electrical and structural properties of MOS devices can be obtained from these measurements. Main chemical bonds and thickness of gate oxide, threshold voltage, flatband voltage, series resistance and channel length for MOS devices are some of the parameters that can be obtained by these measurements. MOS capacitors and MOSFET devices with a CMOS standard fabrication process in INAOE were measured. Stress voltage was applied in MOS devices to extract lifetime characteristics and therefore, their reliability. The results showed to have a high correlation with manufacturing specifications.