Ohmic contacts to n-GaN formed by ion-implanted Si into p-GaN

摘要

In this paper, we report the ohmic contact to n-GaN fabricated by implanting silicon into Mg-doped GaN using an alloy of Ti/Al/Ti/Au metallization. The used materials were grown on (001) sapphire substrates by metal-organic chemical-vapor deposition (MOCVD). The layer structure was comprised of a GaN buffer layer and followed by a 2 μm thickness Mg-doped GaN (N_a=5×10~(17)cm~3) and then double silicon implantation was performed in order to convert p-type GaN into n-type GaN films. The as-implanted samples were then thermal annealed at 1150°C for 5 min in N_2 ambient. The carrier concentration and Hall mobility were 3.13×10~(18) cm~3 and 112 cm~2/ (V·s) measured by Hall method. Multilayer electrode of Ti (50 nm)/Al (50 nm)/Ti (30 nm)/Au (30 nm) was deposited on n-GaN using an electron-beam evaporation and contacts were formed by a N_2 annealing technique ranging from 600 to 900°C. After annealing lower than 700°C, the contacts exhibited a rectifying behavior and became ohmic contact only after high temperature processes (≥700°C). Specific contact resistance was as low as 9.58×10~(-4) Ω· cm~2 after annealing at 800°C for 60 seconds. While annealing temperature is higher than 800°C, the specific contact resistance becomes worse. This phenomenon is caused by the surface morphology degradation.