MODELLING MEMS RESONATORS PAST PULL-IN

摘要

In this paper, we develop a mathematical model of an electrostatic MEMS beam undergoing impact with a stationary electrode subsequent to pull-in. We model the contact between the beam and the substrate using a nonlinear foundation of springs and dampers. The system partial differential equation (PDE) is converted into coupled nonlinear ordinary differential equations (ODEs) using the Galerkin method. A numerical solution is obtained by treating all nonlinear terms as external forces.