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MEMS resonator, sensor having the same and manufacturing method for MEMS resonator
MEMS resonator, sensor having the same and manufacturing method for MEMS resonator
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机译:MEMS谐振器,具有该谐振器的传感器及其制造方法
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摘要
A microelectromechanical system (MEMS) resonator, a sensor having the same and a method for manufacturing the MEMS resonator are provided. The MEMS resonator includes a base substrate of the MEMS resonator, the base substrate having a recess portion recessed into one surface thereof, an oscillator mounted at the base substrate and at least partially overlapping the recess portion to be vibrated using an empty space of the recess portion, and a wire connected to the oscillator and the base substrate, respectively, to control a natural frequency of the MEMS resonator by supporting at least part of the oscillator. Accordingly, the natural frequency of the resonator can be easily controlled.
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