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Reliability Analysis of Copper Interconnection in System-in-package Structure

机译:封装系统中铜互连的可靠性分析

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The system-in-package (SiP) is. one of the popular designs to meet the trend of Integrated Circuit (IC) development. It is known for its small size, light weight, and multiple functionality. In this paper, a radio frequency front end module (RF-FEM) incorporated with the novel wafer-level chip scale package (WLCSP) technology is investigated. Generally the solder joints in WLCSP are the weakest portions due to the CTE mismatch between the PCB board and the package. For the SiP structure investigated, the filler polymer is treated as a good stress buffer layer to relax most CTE-mismatch-induced thermal stress. However, the interconnection laminated within the filler polymer is pulled by the expansion of the polymer with relatively higher thermal stresses. The reliability of copper interconnection between chips then becomes a serious issue for the SiP structure.Finite element analysis (FEA) was applied to evaluate the stress distribution of the SiP structure under the thermal loading from 25°C to 125°C. Both package-level and board-level structures are studied. The same fatigue phenomenon is observed in similar package structures [1-3]. Investigating further, two failure mechanisms are disclosed in the package-level structure and board-level structure, respectively. The first failure mechanism is due to the CTE mismatch among the copper interconnections, filler polymer, and chips. Meanwhile, the second failure mechanism is due to the expansion of the filler polymer which will pull the copper interconnection, thereby aggravating the stress concentration behavior, especially at the chip/polymer edge.To reduce the effect of CTE mismatch, several parametric studies are performed to enhance the reliability of copper interconnections. Finally, a compromised optimal distance is found to minimize the stress concentration of vias on chips would be decided.
机译:系统级封装(SiP)是。满足集成电路(IC)发展趋势的流行设计之一。它以其小巧的体积,轻巧的功能和多种功能而著称。本文研究了结合了新型晶圆级芯片规模封装(WLCSP)技术的射频前端模块(RF-FEM)。通常,由于PCB板和封装之间的CTE不匹配,WLCSP中的焊点是最弱的部分。对于所研究的SiP结构,将填料聚合物视为良好的应力缓冲层,以缓解大多数CTE不匹配引起的热应力。但是,层压在填充聚合物内的互连通过具有相对较高热应力的聚合物膨胀而被拉动。因此,芯片之间铜互连的可靠性成为SiP结构的重要问题。 应用有限元分析(FEA)来评估在25°C至125°C的热载荷下SiP结构的应力分布。研究了封装级和电路板级的结构。在类似的包装结构中观察到相同的疲劳现象[1-3]。进一步研究,分别在封装级结构和板级结构中公开了两种故障机制。第一种故障机制是由于铜互连,填充聚合物和芯片之间的CTE不匹配。同时,第二种失效机理是由于填充聚合物的膨胀,它将拉扯铜互连,从而加剧了应力集中行为,尤其是在芯片/聚合物边缘。 为了减少CTE不匹配的影响,进行了一些参数研究以增强铜互连的可靠性。最后,发现了折衷的最佳距离,可以最大程度地减少芯片上过孔的应力集中。

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