Multilayer Fabry-Perot microbolometers for infrared detection

摘要

Conventional Fabry-Perot microbolometers have limited design parameters that can be used to tailor spectral response. To provide more design variables we consider two stacked bolometer layers, and use a genetic algorithm (GA) to find designs with specific spectral features. Objectives include broad band absorption over 3 to 13 microns and a two band design, with one layer absorbing 3-5 microns, while the other layer absorbs in the 7 to 14 micron band.