Multilayer Fabry-Perot Microbolometers for Infrared Wavelength Selective Detection

摘要

Multi-color narrow-band Salisbury Screen and Jaumann Absorbers using optimized thickness Si_3N_4 layers are designed that produce wavelength selectivity in 7 ～ 14μm wavelength band. The Jaumann Absorbers can be used as a vertically stacked pixel structure to save space and enhance resolution compared to frequency selective Salisbury Screens pixels lying in a common plane.