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Challenges and Future Directions of Laser Fuse Processing in Memory Repair

机译:激光熔断器处理中的挑战和未来方向

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This paper reviews the current status of laser fuse processing and discusses the challenges ahead. Various processing parameters are discussed including laser wavelengths, laser pulse duration and shaping, laser beam polarization, laser beam positioning accuracy, and thermal effect, and their impacts on fuse size limitation. We also examine the interrelationships among these parameters. Experiments and evaluations have been conducted, including the use of new laser sources and processing techniques, improved optical system, and beam positioning system. The results, together with several potential solutions for the next generation of laser memory repair system, are presented.
机译:本文综述了激光熔断器处理的现状,并讨论了前方的挑战。讨论了各种处理参数,包括激光波长,激光脉冲持续时间和成型,激光束极化,激光束定位精度和热效果,以及它们对熔丝尺寸限制的影响。我们还在这些参数中检查了相互关系。已经进行了实验和评估,包括使用新的激光来源和加工技术,改进的光学系统和光束定位系统。结果,介绍了下一代激光记忆修复系统的几种潜在解决方案。

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