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Improved Yields and Etching Latitude with Wet Lamination of Thin Dry Film Photoresists

机译:湿法干燥干法薄膜光刻胶可提高产量和蚀刻范围

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Today's PWB manufacturers are being challenged by their customers to develop printed circuits boards that have greater functionality and lower cost. This results in a need for photoresists that will enable the production of boards with finer circuits (greater functionality) and higher yield (lower cost). Current resolution requirements are ≥ 75 μm. Over the next one to two years, these requirements are expected to decrease to 50 μm and below. Finer resist resolution can be obtained by reducing the resist thickness. Thinner resists also improve the quality and latitude for etching fine copper traces. However, reducing the resist thickness will result in poorer conformation during lamination to the copper substrate. This can be offset by applying a thin layer of water to the substrate surface before lamination. The water plasticizes the resist at the interface allowing it to flow and conform to the substrate surface. Here we describe the development of a new thin dry film photoresist that has been optimized for good conformation using wet lamination, and the development of new equipment for applying consistent low levels of water to the substrate surface before lamination. Yield improvement data will be shown from multiple PCB manufacturing sites.
机译:当今的PWB制造商正面临客户挑战,以开发功能更强大,成本更低的印刷电路板。这导致对光致抗蚀剂的需求,该光致抗蚀剂将使得能够生产具有更精细电路(更大功能)和更高产量(更低成本)的板。当前的分辨率要求≥75μm。在未来的一到两年内,这些要求有望降低到50μm或更低。可以通过减小抗蚀剂厚度来获得更精细的抗蚀剂分辨率。较薄的抗蚀剂还可以提高蚀刻细铜迹线的质量和范围。然而,减小抗蚀剂厚度将导致在层压至铜基板期间的较差的构象。这可以通过在层压之前在基板表面上施加一薄层水来抵消。水使界面处的抗蚀剂增塑,使其流动并顺应基材表面。在这里,我们描述了一种新的干膜光致抗蚀剂的开发过程,该过程已通过湿法层压进行了优化,以实现良好的构象,还开发了一种新的设备,用于在层压前向基材表面施加一致的低量水。产量提高数据将显示在多个PCB制造厂。

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