Abstract: We report on the recent progress in the development membrane micromachined deformable mirrors (MMDM) technology. A MMDM with a membrane diameter of 50 mm developed for an astronomical application has a P-V surface error of 1.8 $mu@m within light aperture of 35 mm. The mirror features a maximum surface deflection of 18 $mu@m and a response time better than 2 ms. A highly reflective (R approximately 99.8%) MMDM can be continuously operated under a CW laser load of up to 50 W. A special linear configuration of MMDM was recently used to compress a femtosecond laser pulse from 150 fs to 15 fs, also circular MMDM was used to correct wavefront deformations in femtosecond lasers. We also report on the application of the MMDM in a self-referenced adaptive optical system with the loop frequency of 8 Hz and for coupling of pumping radiation in fiber lasers with considerable - up to 48% - improvements of the coupling/luminescence efficiency.!14
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