Recent progress in technology and applications of membrane micromachined deformable mirrors

摘要

Abstract: We report on the recent progress in the developmentmembrane micromachined deformable mirrors (MMDM)technology. A MMDM with a membrane diameter of 50 mmdeveloped for an astronomical application has a P-Vsurface error of 1.8 $mu@m within light aperture of 35mm. The mirror features a maximum surface deflection of18 $mu@m and a response time better than 2 ms. A highlyreflective (R approximately 99.8%) MMDM can becontinuously operated under a CW laser load of up to 50W. A special linear configuration of MMDM was recentlyused to compress a femtosecond laser pulse from 150 fsto 15 fs, also circular MMDM was used to correctwavefront deformations in femtosecond lasers. We alsoreport on the application of the MMDM in aself-referenced adaptive optical system with the loopfrequency of 8 Hz and for coupling of pumping radiationin fiber lasers with considerable - up to 48% -improvements of the coupling/luminescenceefficiency.!14