Characterization of a Micromachined Membrane Deformable Mirror (Karakterisering av en Deformerbar Membranspegel)

摘要

The purpose of this work was to evaluate a 37 channel micro machined membrane deformable mirror which is a component used in adaptive optics. Several transfer functions with different mirror bias shapes were determined and analyzed. An interferometer was used to measure and to evaluate the transfer functions. The capacity of the mirror to produce wave fronts containing single Zemike coefficients was tested with an open loop scheme. A closed loop scheme was used for one of the transfer functions to construct three different Zemike polynomials. The results show that the mirror has a capacity to produce wave fronts using Zernike polynomials with coefficient values that have the magnitude of a few radians measured relative the bias. The number of the mirror eigen modes used in the wave front reconstruction was found to be of major importance. The closed loop reconstruction scheme enhanced the results in comparison to the open loop scheme.