A capacitive tri-axial tactile force sensor design

摘要

Summary form only given. A tri-axial tactile force sensor designis presented. The multiple electrode design allows the sensor to detectdisplacements of an electrode relative to a second set of electrodes.The primary role of this force sensor is for integration into the fingerof an articulated hand such as the Stanford/JPL hand or the Utah/MIThand. The sensor is fabricated on a Kapton substrate to allow for therequired flexibility. Electrodes are patterned using microelectronicfabrication techniques providing both dimensional accuracy and theability to fabricate very small sensor elements. Once the single sensorelements have been sufficiently tested, arrays of sensor elements can beintegrated into a tactile finger design