A micromachined resonator is investigated with respect to its response on short uncorrelated impacts. The measured amplitude spectrum is dominated by resonances caused by the fundamental and first order bending modes as well the torsional mode of the resonator with its amplitude ratio depending on the direction of excitation. Using this sensor solid borne vibrations generated by a centrifugal pump under different conditions of operation were investigated. The obtained results show that cavitation can be monitored at ouput data rates which can be easily transmitted by a field bus.
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