Development of pellicle for ArF excimer laser

摘要

We tested the membrane longevity of the fluoropolymer using narrow-banded ArF Excimer Laser with spectro-width 0.8 pm. We compared the result with that of using free-run Laser which is not narrow-banded with spectro-width 450 pm. We obtained the following findings: (1) Under the air environment, the membrane longevity improves about 4 times by using narrow- banded Laser compared to free-run Laser. A transmission deterioration due to creation of the light absorption substances on the membrane is not occurred under the air environment either by free-run Laser or by narrow-banded Laser. (2) Under the nitrogen environment, creation of the light absorption substances is suppressed by using narrow- banded Laser, and this leads to the membrane longevity improvement. However, as compared to under the air environment, the membrane longevity is shortened by approximately 10 times.