A novel waveguide photodiode is proposed. This photodiode uses uni-traveling-carrier structure which makes it possible to simultaneously achieve high output voltage and high speed. With a 50-/spl Omega/ load, the photodiode having an external quantum efficiency of 32% yields an output voltage of 1.3 V with a bandwidth of 55 GHz and 0.45 V with a bandwidth of 70 GHz.
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