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Method of manufacturing photodiode with waveguide structure and photodiode
Method of manufacturing photodiode with waveguide structure and photodiode
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机译:具有波导结构的光电二极管的制造方法和光电二极管
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摘要
A process to form a photodiode (PD) with the waveguide structure is disclosed. The PD processes thereby reduces a scattering of the parasitic resistance thereof. The process includes steps to form a PD mesa stripe, to bury the PD mesa stripe by the waveguide region, to etch the PD mesa stripe and the waveguide region to form the waveguide mesa stripe. In the etching, the lower contact layer plays a role of the etching stopper.
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