Characterisation of probe-tip/sample signal transmission in electrical sampling scanning force microscopy

摘要

A canning force microscope test system has been used in former work for MMIC characterisation up to 40 GHz. The local probe-tip/sample interaction is known but the transmission of high frequency sampling signals cna cause unknown disturbances on the sample. Therefore for the first time systematic investigations of the probe-tip/sample interaction for various parameters are made. The results allow a closer understanding of the probe-tip behaviour and show possible ways for improved probe-tip geometries.