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Growth kinetics of intermetallic compound layers at the interface during laser-assisted bonding depending on surface finish

机译:取决于表面光洁度,激光辅助键合过程中界面金属间化合物层的生长动力学

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Mass reflow (MR) has been widely used in the interconnecting process of electronic packaging. However, use of conventional MR shows a limitation in the miniaturization trend of electronic devices because of thermal damage to heat- sensitive polymer components from the high process temperature and long bonding time. Furthermore, MR cannot avoid warpage issues because it cannot provide thermal selectivity to the bonding area. These representative problems of MR indicate the need for an advanced bonding process with selectivity and mass product possibility. To meet the requirements of electronic packaging, advanced bonding processes were needed. Laser-assisted bonding (LAB) has been spotlighted as a next-generation interconnection technology to overcome the problems of MR. LAB has extremely fast ramping up speed with accurately controlled wavelength and excellent thermal selectivity. The LAB process could be applied in bonding of flexible, foldable, and even stretchable applications involving a polymer component with a low glass transition temperature. Furthermore, the short process time of LAB could provide not only enhanced productivity, but improvement in mechanical properties as a result of finer grain size and reduction in intermetallic compound (IMC) formation.SAC305 solder paste was printed on two kinds (OSP and ENEPIG) of surface-finished Cu electrode, and MR and LAB processes were performed to create solder joints. The mechanical reliability of solder joint was evaluated with shear test according to the JEDEC standard. Formation and growth of an IMC layer at the interface between SAC solder and Cu after soldering were identified with FESEM. A high- temperature storage test was performed to evaluate the longterm reliability of LAB compared to that of MR. Voids in solder joints were identified by x-ray scanner to compare the soldering processes and surface finish depending on aging time. Smaller IMC layer between solder joint and electrode thickness and fewer voids in solder joints were produced with LAB compared to MR.
机译:质量回流(MR)已广泛用于电子封装的互连过程中。然而,由于高工艺温度和长键合时间对热敏聚合物组分的热损伤,常规MR的使用在电子设备的小型化趋势中显示出局限性。而且,MR不能避免翘曲问题,因为它不能提供对粘合区域的热选择性。 MR的这些代表性问题表明,需要具有选择性和批量生产可能性的先进键合工艺。为了满足电子包装的要求,需要先进的粘合工艺。激光辅助键合(LAB)作为下一代互连技术已受到关注,以克服MR问题。 LAB具有极快的上升速度,精确控制的波长和出色的热选择性。 LAB工艺可用于涉及具有低玻璃化转变温度的聚合物组分的柔性,可折叠,甚至可拉伸应用的粘合。此外,由于LAB的处理时间短,不仅可以提高生产率,而且由于晶粒细小和金属间化合物(IMC)形成减少而改善了机械性能.SAC305焊膏印刷在两种(OSP和ENEPIG)上表面抛光的铜电极,并执行MR和LAB工艺以创建焊点。根据JEDEC标准,通过剪切试验评估了焊点的机械可靠性。用FESEM确定了SAC焊料和Cu之间的界面处IMC层的形成和生长。进行了高温存储测试,以评估LAB与MR相比的长期可靠性。 X射线扫描仪可以识别焊点中的空隙,以根据时效时间比较焊接过程和表面光洁度。与MR相比,使用LAB生产的焊点和电极厚度之间的IMC层更小,焊点中的空隙更少。

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