Research on High Precision Positioning 6Hrvo Control of PMSM

摘要

For the high-precision position control of the two-dimensional turntable, the mechanism of the positioning error of the two-dimensional turntable is analyzed first, the key factors affecting the tracking accuracy are proposed, and the index decomposition method of the two-dimensional turntable is proposed to guide the design of the two-dimensional turntable drive system. By establishing a closed-loop control model of a two-dimensional turntable, an improved control algorithm based on classic PID control is proposed. Through experimental verification on the product, the steady-state accuracy of the two-dimensional turntable reached 1 µrad.