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Non-destructive Inspection of Flip-Chip BGA Solder Ball Defects Using Two Laser Beam Probe Ultrasonic Inspection Technique

机译:使用两种激光束超声波检查技术对倒装芯片BGA焊球缺陷进行无损检查

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The implementation of surface mount ball grid array (BGA) technologies in microelectronics industry has given way to the manufacturing of even more compact systems with reduced size and pitch of solder bumps that are increasingly challenging to inspect for their quality assurance. Current non-destructive inspection methods such as X-ray, and Acoustic Microscopy techniques have limitations in identifying defects. The low cost, non-destructive Laser Beam Probe Ultrasonic Inspection (LBPUI) technique has the potential to overcome these limitations and enable rapid assessment of chip packages on and off the assembly line. In this study, Flip Chip BGA packages subjected to bend testing are inspected using the LBPUI technique. Two optical fiber probes are used to carry pulsed Nd:YAG laser energy to the surface of the FCBGA package to induce ultrasound in the package. The quality of solder balls are assessed by analyzing the out-of-plane displacement responses on the surface of the package as measured by a laser interferometer. The results from LBPUI technique are validated with the results of destructive cross-sectional analysis.
机译:在微电子行业中,表面安装球栅阵列(BGA)技术的实施已经让位于制造更加紧凑的系统,这些系统具有减小的焊料凸点尺寸和间距,因此对其质量保证进行检查越来越具有挑战性。当前的非破坏性检查方法(例如X射线)和声学显微镜技术在识别缺陷方面存在局限性。低成本,非破坏性的激光束探头超声波检查(LBPUI)技术具有克服这些局限性的潜力,并能够快速评估装配线上和下线时的芯片封装。在这项研究中,使用LBPUI技术检查了经过弯曲测试的倒装芯片BGA封装。两个光纤探头用于将脉冲Nd:YAG激光能量传输到FCBGA封装的表面,以在封装中感应超声波。焊球的质量是通过分析由激光干涉仪测量的封装表面上的平面外位移响应来评估的。 LBPUI技术的结果已通过破坏性横截面分析的结果进行了验证。

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