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The performance of sintered nanocopper interconnections for high temperature device

机译:高温器件烧结纳米铜互连的性能

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IGBT device is developed from silicon to wide bandgap semiconductor materials, and its working temperature has reached to 300 °C, so the encapsulation is particularly important. NanoCu paste is investigated under H2 at 300°C. A chip is linked to DBC substrate by nanoCu paste under air with different temperature. Results shows the increase of sintered time temperature effectively reduce the porosity of sintered layer and enhance the strength.
机译:IGBT器件是从硅发展到宽带隙半导体材料的,其工作温度已达到300°C,因此封装尤为重要。在300°C的H2下研究了NanoCu糊剂。芯片通过在不同温度的空气中通过nanoCu胶与DBC基板连接。结果表明,提高烧结时间可以有效降低烧结层的孔隙率,提高强度。

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