A Design-for-Test Solution for Monolithic 3D Integrated Circuits

摘要

Monolithic three-dimensional (M3D) integration has the potential to achieve significantly higher device density compared to 3D integration based on through-silicon vias (TSVs). We propose a test solution for M3D ICs based on dedicated test layers that are inserted between functional layers. We evaluate the cost associated with the proposed design-for-test (DfT) solution and compare it with that for a potential DfT solution based on the IEEE Std. P1838. Our results show that the proposed solution is more cost-efficient than the P1838-based solution for a wide range of inter-layer via (ILV) density, ILV yield, and defect density.