An in-situ prepared synchronous self-compensated film strain gage for high temperature

摘要

The strain of components at high temperature was usually measured by thin film strain gage prepared on the components. However, temperature effect caused by the thermal expansion coefficient mismatch between substrate and strain gage film usually induces the measurement error of metal film strain gage. This paper reports a novel temperature compensation method for in-situ prepared PdCr strain gage. A suspended PdCr film and PdCr film adherent to the substrate with the same layout were deposited, in which a suspended PdCr film was used for the temperature compensation system of PdCr film. The temperature coefficient of resistance (TCR) for the suspended PdCr film and PdCr film adherent to the substrate was measured up to 380°C. Meanwhile, the gage factor K for PdCr film has been calculated for different temperature.