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A self-compensated ceramic strain gage for use at elevated temperatures

机译:可在高温下使用的自补偿陶瓷应变计

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A ceramic thin film strain gage has been developed for static strain measurements at temperatures up to 1400℃. These thin film sensors are ideally suited for in situ strain measurement in harsh environments, such as those encountered in the hot sections of gas turbine engines. However, the wide bandgap semiconductor used as the active strain elements in these devices also exhibited a large-temperature coefficient of resistance (TCR). Thus, to reduce the apparent strain or thermally induced strain in these static strain sensors to an acceptable level, a novel self-compensation scheme was demonstrated using thin film platinum resistors placed in series with the active strain element. A mathematical model was developed and design rules were established for the self-compensated circuitry using this approach. Close agreement between the model and actual Static strain results have been achieved using this approach, and reliable static strain measurements have been made over an extended temperature range.
机译:已经开发出一种陶瓷薄膜应变计,用于在高达1400℃的温度下进行静态应变测量。这些薄膜传感器非常适合在恶劣环境中进行现场应变测量,例如在燃气轮机发动机高温区域遇到的应变传感器。但是,在这些器件中用作有源应变元件的宽带隙半导体也表现出较大的电阻温度系数(TCR)。因此,为了将这些静态应变传感器中的表观应变或热感应应变降低到可接受的水平,使用与有源应变元件串联放置的薄膜铂电阻器,展示了一种新颖的自补偿方案。使用这种方法,开发了数学模型,并为自补偿电路建立了设计规则。使用这种方法已经在模型和实际静应变结果之间达成了紧密的一致,并且在扩展的温度范围内进行了可靠的静应变测量。

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