Laterally vibrating lithium niobate MEMS resonators with 30 electromechanical coupling coefficient

摘要

This paper demonstrates laterally vibrating lithium niobate (LN) microelectromechanical (MEMS) resonators operating at 500 MHz with an electromechanical coupling coefficient (kt2) around 30% - the highest ever attained for this class of resonators. This accomplishment is made possible by the use of direct bonding of bulk X-cut LN wafers to high resistivity silicon and a resonator electrode layout that permits harnessing the full capabilities of the film.