首页> 外国专利> BULK ACOUSTIC RESONATOR SET, FILTER, ELECTRONIC DEVICE, ELECTROMECHANICAL COUPLING COEFFICIENT ADJUSTMENT METHOD

BULK ACOUSTIC RESONATOR SET, FILTER, ELECTRONIC DEVICE, ELECTROMECHANICAL COUPLING COEFFICIENT ADJUSTMENT METHOD

机译:散装声谐振器组,滤波器,电子设备,机电耦合系数调整方法

摘要

The present invention relates to a bulk acoustic resonator component, comprising at least two bulk acoustic resonators provided on a same substrate, each resonator comprising: an acoustic mirror; a bottom electrode; a top electrode; and a piezoelectric layer, an overlapping area of the acoustic mirror, the bottom electrode, the piezoelectric layer, and the top electrode in the thickness direction of the resonator constituting an effective area of the resonator, where: the at least two bulk acoustic resonators comprise a first resonator and a second resonator; the first resonator comprises a first piezoelectric layer, the second resonator comprises a second piezoelectric layer, the first piezoelectric layer and the second piezoelectric layer are of a same material and arranged in a same layer, and the thickness of the first piezoelectric layer is greater than the thickness of the second piezoelectric layer. The present invention also relates to an electromechanical coupling coefficient adjustment method, a filter comprising the bulk acoustic resonator set, and an electronic device.
机译:本发明涉及一种散装声谐振器部件,包括设置在相同基板上的至少两个散装声谐振器,每个谐振器包括:声镜;底部电极;顶电极;和压电层,声学镜的重叠区域,底部电极,压电层和顶部电极在构成谐振器的有效面积的谐振器的厚度方向上,其中包括至少两个散装声谐振器包括第一谐振器和第二谐振器;第一谐振器包括第一压电层,第二谐振器包括第二压电层,第一压电层和第二压电层具有相同的材料并布置在相同的层中,并且第一压电层的厚度大于第二压电层的厚度。本发明还涉及一种机电耦合系数调节方法,包括散装声谐振器组的过滤器和电子设备。

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