DC-contact, wide band, electrostatically actuated lateral RF MEMS switch for efficient signal switching

摘要

This paper presents the design, simulation and characterization of a series-shunt RF microelectromechanical systems switch actuated by an electrostatic actuator. In this switch, two series switches are cascaded by a quarter wavelength section of transmission line suspended over the trench of the substrate to form a series-shunt configuration according to the principle of impedance transforming. The switch has three operating states of ON, OFF and Deep-OFF. The switch is normally OFF and two electro-static actuators are used in switch structure in order to drive the switch to ON or Deep-OFF states. The OFF state isolation of the switch is -40 up to 25 GHz. The insertion loss of the switch in the ON state is -0.6 dB at 20 GHz. The isolation is -80 dB at 5 GHz, -75 dB at 10 GHz and -65 dB at 20 GHz. The required actuation voltage for drive and actuate is 37 V. The switch transition time from OFF to ON state is 37 fis. The switch has potential applications in low power and high performance RF tuning and switching applications.