A novel e-band nearfield scanner for wafer probed on-chip antenna characterisation

摘要

We present a novel design for a nearfield scanning probe for characterising mm-wave on-chip antennas that integrates into a conventional probe station, with only replacement of a single wafer probe required. The proposed probe is a quarter-wave wide monopole backed by a quarter-wave spaced ground plane, which creates a forward-looking beam pattern. This off-normal incidence of energy on the AUT directs reflection off the chuck away from the probe. Comparison between farfield simulated and nearfield-calculated results of an E-band on-chip antenna indicate correspondence to within 0.27 dB in the main beam width without probe correction.