Highly Scalable 2nd-Generation 45-nm Split-Gate Embedded Flash with 10-ns Access Time and 1M-Cycling Endurance

摘要

We present a highly scalable 2nd generation 45-nm split-gate embedded flash, which has been scaled of 40% unit-cell-size (almost same size with 28-nm technology node) from the 1st generation 45-nm embedded flash without using extra masks, processes and advanced-equipment. By optimizing process of triple-gate flash architecture and implementing several design methodologies, high speed operation (10ns random access time, 25us write time and less than 2ms erase operation) and robust reliability (1M cycle, 20 retention) are achieved. It has been successfully verified in range of 1Mb up to 16Mb density flash IPs