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Fast Digital-Controlled Multi-Step Process of Ultra-Smooth Diamond-Like Carbon Thin Films

机译:超光滑类金刚石碳薄膜的快速数字控制多步工艺

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Hard disk drives play a vital role in the Information Age by packing trillions of bytes of digital data in compact recording devices which consist, in part, of magnetic recording layers. An ultra-thin overcoat of microscopically smooth diamond-like carbon thin film is the main defense that protects the magnetic recording film stack from oxidation. To improve the diamond-like carbon film properties for gains in recording density, digital-controlled plasma processing technologies are implemented with a wide range of pulsing frequency and duty ratio of pulsed DC power. A design of experiments study is conducted to optimize time-averaged ion bombardment efficiency as well as surface mobility of adsorbed hydrocarbon gas precursors, achieving 5-10 % improvement in optimal coating thickness. Responsive digital control also enables pre-or post-processing steps being integrated in the same process cycle along with the diamond-like carbon deposition process. Arc detection and suppression electronics and software help ensure process stability and repeatability in high throughput production environment. This paper presents a brief overview of the digital control technologies and the resulting benefits towards improving diamond-like carbon thin film coatings.
机译:硬盘驱动器通过将数万亿字节的数字数据打包到部分由磁记录层组成的紧凑型记录设备中,在信息时代起着至关重要的作用。显微光滑的类金刚石碳薄膜的超薄外涂层是保护磁记录膜叠层免受氧化的主要防御手段。为了提高类金刚石碳膜的性能以提高记录密度,采用了宽范围的脉冲频率和脉冲直流电源占空比的数字控制等离子体处理技术。进行了一项实验研究设计,以优化时间平均离子轰击效率以及吸附的烃类气体前体的表面迁移率,从而将最佳涂层厚度提高了5-10%。响应式数字控制还使前处理步骤或后处理步骤与类金刚石碳沉积过程一起集成在同一处理周期中。电弧检测和抑制电子设备和软件可帮助确保高产量生产环境中的过程稳定性和可重复性。本文简要概述了数字控制技术及其在改善类金刚石碳薄膜涂层方面的好处。

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