An Ultra-Fast Electrothermal Micromirror with Bimorph Actuators Made of Copper/Tungsten

机译：具有铜/钨制成的Bimorph执行器的超快速电热微镜

获取原文

页面导航

摘要
著录项
相似文献
相关主题

摘要

This paper reports an ultra-fast electrothermal bimorph micromirror with an inverse-series-connected bimorph actuator, which is made up of Cu-W bimorph. This mirror has a high rotational resonant frequency of 12.8 kHz.

机译：本文报道了一种超快速电热双芯片微镜，其具有逆系列连接的Bimorph执行器，该致动器由Cu-W双芯片组成。该镜子具有12.8 kHz的高旋转谐振频率。

著录项

来源
《International Conference on Optical MEMS and Nanophotonics》|2017年|162p|共2页
会议地点
作者
Dingkang Wang; Xiaoyang Zhang; Liang Zhou; Mengyue Liang; Daihua Zhang; Huikai Xie;
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种
中图分类 TN29-53;
关键词
Bimorph actuator; MEMS; Micromirror; Electrothermal actuation; Fast scanner; Resonant scanning;

机译：Bimorph执行器;MEMS;微镜;电热致动;快速扫描仪;谐振扫描;

相似文献

外文文献
中文文献
专利

1. Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type [J] . Cheng-Hua Tsai, Chun-Wei Tsai, Hsu-Tang Chang, Sensors . 2015,第6期

机译：具有双压电晶片执行器的电热致动微镜-弯曲型和扭转型
2. High-Fill-Factor Micromirror Array With Hidden Bimorph Actuators and Tip–Tilt-Piston Capability [J] . Jia K., Samuelson S. R., Xie H. Microelectromechanical Systems, Journal of . 2011,第3期

机译：具有隐藏式双压电晶片执行器和尖端倾斜活塞功能的高性能滤镜微镜阵列
3. Distributed and lumped element models for a bimorph-actuated micromirror [J] . Sagnik Pal, Hulkai Xie Journal of Micromechanics and Microengineering . 2010,第4期

机译：双压电晶片驱动的微镜的分布式和集总元素模型
4. An Ultra-Fast Electrothermal Micromirror with Bimorph Actuators Made of Copper/Tungsten [C] . Dingkang Wang, Xiaoyang Zhang, Liang Zhou, International Conference on Optical MEMS and Nanophotonics . 2017

机译：具有铜/钨制成的Bimorph执行器的超快速电热微镜
5. An electrothermally actuated bi-axial scanning micromirror for medical imaging applications. [D] . Izhar, Umer. 2010

机译：用于医学成像应用的电热致动双轴扫描微镜。
6. Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type [O] . Cheng-Hua Tsai, Chun-Wei Tsai, Hsu-Tang Chang, 2015

机译：具有双压电晶片执行器的电热致动微镜-弯曲型和扭转型
7. Electrothermally-Actuated Micromirrors with Bimorph Actuators—Bending-Type and Torsion-Type [O] . Cheng-Hua Tsai, Chun-Wei Tsai, Hsu-Tang Chang, 2015

机译：具有双晶片致动器的电热驱动微镜 - 弯曲型和扭转型
8. Segmented Control of Electrostatically Actuated Bimorph Micromirrors. [R] . Waggoner, K. W. 2018

机译：静电驱动双晶片微镜的分段控制。

An Ultra-Fast Electrothermal Micromirror with Bimorph Actuators Made of Copper/Tungsten

摘要

著录项

相似文献

相关主题

期刊订阅