AC VOLTAGE REFERENCE BASED ON A CAPACITIVE MICROMECHANICAL COMPONENT

摘要

The design and characterization of a high stability capacitive MEMS device intended for an AC voltage reference at 100 kHz or higher frequencies is presented. Preliminary results from a first prototype device show that the pull-in voltage of the device is stable to within 10 ppm over 60 hours. We discuss an optimised device design which is expected to show greater stability.