Fused Silica Fine Grinding with Low Roughness

摘要

Lithography-optics is one of the most complex optical systems. The fine grinding process is the most important step before polishing. Roughness and sub-surface damage (SSD) are essential outputs of fine grinding. We demonstrate the method that use fix abrasive cup tool with CNC grinding machine to complete the fine grinding process, even instead of lapping process. And experiment sample roughness can reach 23.40nm rms and Ra 18.554nm. The SSD estimate is about 2 μm which is also smaller than commercial lapping process. The fine grinding output can satisfy the lithography optic fabrication demands and efficiently reduce the polishing time.